![]() ![]() Clawson, "Guide to references on III±V semiconductor chemical etching", 2001 This table shows common metals and which Transene etchants they are attacked by/impervious to.Sputter rates of various materials, indicative or hardness and dry etching properties.Useful info about evaporating and sputtering many materials.Kurt J Lesker: Material Deposition Chart.Physical Properties of Semiconductors (Ioffe Institute).Boiling points of various compounds can tell you how volatile an etch product may be in a reactive ion etch, or whether they need to be wet-etched instead.: Film Stress, Ion Implant, Thermal Oxidation, KOH Etching & online curve-fitting.Mean Free Path tables (Pfeiffer Vacuum).This Thermal Ox calculator allows you to tweak the calculation using the Partial Pressure variable, to match your experimental data.Thermal Oxide Calculator (Leland Stanford Jr.). ![]() 5.2.5.5 Other sources of lithography CAD files.
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